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Temperature Uniformity of Wafer on a Large-Sized Susceptor for a Nitride Vertical MOCVD Reactor
Li, Zhi-Ming, Jiang, Hai-Ying, Han, Yan-Bin, Li, Jin-Ping, Yin, Jian-Qin, Zhang, Jin-ChengVolume:
29
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/29/3/030701
Date:
March, 2012
File:
PDF, 692 KB
english, 2012