Temperature Uniformity of Wafer on a Large-Sized Susceptor...

Temperature Uniformity of Wafer on a Large-Sized Susceptor for a Nitride Vertical MOCVD Reactor

Li, Zhi-Ming, Jiang, Hai-Ying, Han, Yan-Bin, Li, Jin-Ping, Yin, Jian-Qin, Zhang, Jin-Cheng
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
29
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/29/3/030701
Date:
March, 2012
File:
PDF, 692 KB
english, 2012
Conversion to is in progress
Conversion to is failed