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Control of the plasma chemistry of a pulsed inductively coupled methane plasma
Bauer, Martin, Schwarz-Selinger, Thomas, Kang, Hyungdong, Keudell, Achim vonVolume:
14
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/14/3/017
Date:
August, 2005
File:
PDF, 182 KB
english, 2005