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Effects of substrate temperature on structural and electrical properties of cubic silicon carbide films deposited by hot wire chemical vapor deposition technique
Jha, Himanshu S., Agarwal, PratimaVolume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-015-2767-z
Date:
May, 2015
File:
PDF, 1.31 MB
english, 2015