Precise surface measurements at the nanoscale

Measurement Science and Technology 2010 / 05 Vol. 21; Iss. 5

Precise surface measurements at the nanoscale

Fedina, L I, Sheglov, D V, Kosolobov, S S, Gutakovskii, A K, Latyshev, A V
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Volume:
21
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/21/5/054004
Date:
May, 2010
File:
PDF, 2.31 MB
english, 2010
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