Combined study on conductive AFM and damascene process to...

Electronic Materials Letters 2015 / 1 Vol. 11; Iss. 1

Combined study on conductive AFM and damascene process to visualize Nano-Scaled defects in Cr thin films on polymer substrate

Jeong, Eun-Wook, Kwon, Se-Hun, Jeong, Haedo, Choe, Youngson, Cho, Young-Rae
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Volume:
11
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-014-4193-4
Date:
January, 2015
File:
PDF, 2.02 MB
english, 2015
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