Effect of creep in RF MEMS static and dynamic behavior

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Microsystem Technologies 2015 / 2

Effect of creep in RF MEMS static and dynamic behavior

Somà, Aurelio, Saleem, Muhammad Mubasher, de Pasquale, Giorgio
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2469-8
Date:
February, 2015
File:
PDF, 1.48 MB
english, 2015
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