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Studies of the Origins of Half-Loop Arrays and Interfacial Dislocations Observed in Homoepitaxial Layers of 4H-SiC
Wang, H., Dudley, M., Wu, F., Yang, Y., Raghothamachar, B., Zhang, J., Chung, G., Thomas, B., Sanchez, E.K., Mueller, S.G., Hansen, D., Loboda, M.J.Volume:
44
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-014-3497-3
Date:
May, 2015
File:
PDF, 1.44 MB
english, 2015