Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation
Teo, Ee Jin, Toyoda, Noriaki, Yang, Chengyuan, Bettiol, Andrew A., Teng, Jing HuaVolume:
117
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-014-8728-1
Date:
November, 2014
File:
PDF, 2.06 MB
english, 2014