Effects of effective reaction radius for neutralization on performance of chemically amplified resists
Kozawa, Takahiro, Santillan, Julius Joseph, Itani, ToshiroVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.06JC02
Date:
June, 2014
File:
PDF, 1.27 MB
english, 2014