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Enhancement-mode AlGaN/GaN HEMTs fabricated by fluorine plasma treatment
Si, Quan, Yue, Hao, Xiaohua, Ma, Yuanbin, Xie, Jigang, MaVolume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/12/124002
Date:
December, 2009
File:
PDF, 413 KB
english, 2009