Nanoscale Investigation of Grain Growth in RF-Sputtered Indium Tin Oxide Thin Films by Scanning Probe Microscopy
Lamsal, B. S., Dubey, M., Swaminathan, V., Huh, Y., Galipeau, D., Qiao, Q., Fan, Q. H.Volume:
43
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-014-3212-4
Date:
November, 2014
File:
PDF, 14.00 MB
english, 2014