Nanoindentation and deformation properties of nanoscale...

Technical Physics Letters 2014 / 12 Vol. 40; Iss. 12

Nanoindentation and deformation properties of nanoscale silicon carbide films on silicon substrate

Grashchenko, A. S., Kukushkin, S. A., Osipov, A. V.
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Volume:
40
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785014120268
Date:
December, 2014
File:
PDF, 415 KB
english, 2014
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