Real-time detection of surface cracks on silicon wafers...

Journal of Mechanical Science and Technology 2015 / 1 Vol. 29; Iss. 1

Real-time detection of surface cracks on silicon wafers during laser beam irradiation

Choi, Sungho, Yoon, Sung-Hee, Jhang, Kyung-Young, Shin, Wan-Soon
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Volume:
29
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-014-1206-z
Date:
January, 2015
File:
PDF, 1.59 MB
english, 2015
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