Deposition of ZnO thin films on Si by RF magnetron...

Journal of Materials Science: Materials in Electronics 2014 / 12 Vol. 25; Iss. 12

Deposition of ZnO thin films on Si by RF magnetron sputtering with various substrate temperatures

Kim, Deok-Kyu, Park, Choon-Bae
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Volume:
25
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-014-2322-3
Date:
December, 2014
File:
PDF, 993 KB
english, 2014
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