Metallic resist for phase-change lithography

Scientific Reports 2014 / 6 Vol. 4

Metallic resist for phase-change lithography

Zeng, Bi Jian, Huang, Jun Zhu, Ni, Ri Wen, Yu, Nian Nian, Wei, Wei, Hu, Yang Zhi, Li, Zhen, Miao, Xiang Shui
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Volume:
4
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep05300
Date:
June, 2014
File:
PDF, 996 KB
english, 2014
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