Aspects of cavity filling with nano imprint
Scheer, Hella-C., Papenheim, M., Dhima, K., Wang, S., Steinberg, C.Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2376-4
Date:
August, 2015
File:
PDF, 654 KB
english, 2015