Design of laser micromachined single crystal 6H–SiC...

Materials & Design 2011 Vol. 32; Iss. 1

Design of laser micromachined single crystal 6H–SiC diaphragms for high-temperature micro-electro-mechanical-system pressure sensors

Saurabh Gupta, Pal Molian
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Volume:
32
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.matdes.2010.06.024
File:
PDF, 1.13 MB
english, 2011
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