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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Implementation of Atomic Layer Deposition in Advanced Semiconductor Processes
Schaekers, Marc, Van Ammel, Annemie, Travaly, Youssef, Delabie, Annelies, Martin Hoyas, Ana, Zhao, ChaoVolume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209325
File:
PDF, 952 KB
english, 2006