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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
Tseng, Wei-Tsu, Kioussis, Dimitri, Manikonda, Shravanthi L., Kim, Hyun-Ki, Choi, Jihong, Zhao, Feng, Economikos, Laertis, Klymko, Nancy, Chace, Mark, Molis, Steve, Chae, Moosung, Engbrecht, Edward, ZiVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2908643
File:
PDF, 638 KB
english, 2008