![](/img/cover-not-exists.png)
An Isoplanar Isolation Technology for SiC Devices Using Local Oxidation
Tyagi, RituVolume:
141
Year:
1994
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2055084
File:
PDF, 967 KB
english, 1994