Conformality of Pb(Zr,Ti)O[sub 3] Films Deposited on Trench...

Electrochemical and Solid-State Letters 2006 Vol. 9; Iss. 1

Conformality of Pb(Zr,Ti)O[sub 3] Films Deposited on Trench Structures Having Submicrometer Diameter and Various Aspect Ratios

Nagai, Atsushi, Minamidate, Jun, Asano, Gouji, Choi, Chel Jong, Cho, Choong-Rae, Park, Youngsoo, Funakubo, Hiroshi
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Volume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2137470
File:
PDF, 336 KB
english, 2006
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