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ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - DFM Study in Low k1 Lithography Process
Wang, Lei, Guo, Xiaobo, Li, Weifeng, Tong, Yufeng, Chen, Fucheng, Meng, Honglin, Su, Bo, Xiao, Sheng'AnYear:
2012
Language:
english
DOI:
10.1149/1.3694315
File:
PDF, 893 KB
english, 2012