Plasma-Enhanced Chemical Vapor Deposited Silicon Oxynitride...

Plasma-Enhanced Chemical Vapor Deposited Silicon Oxynitride Films for Optical Waveguide Bridges for Use in Mechanical Sensors

Storgaard-Larsen, Torben
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Volume:
144
Year:
1997
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837619
File:
PDF, 4.29 MB
english, 1997
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