Plasma-Enhanced Chemical Vapor Deposited Silicon Oxynitride Films for Optical Waveguide Bridges for Use in Mechanical Sensors
Storgaard-Larsen, TorbenVolume:
144
Year:
1997
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837619
File:
PDF, 4.29 MB
english, 1997