Local Corrosion of the Oxide Passivation Layer during Cu Chemical Mechanical Polishing
Kang, Min Cheol, Kim, Yung Jun, Koo, Hyo-Chol, Cho, Sung Ki, Kim, Jae JeongVolume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3236391
File:
PDF, 341 KB
english, 2009