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Electrical Characterization and Transmission Electron Microscopy Assessment of Isolation of AlGaN/GaN High Electron Mobility Transistors with Oxygen Ion Implantation
Shiu, Jin-Yu, Lu, Chung-Yu, Su, Ting-Yi, Huang, Rong-Tan, Zirath, Herbert, Rorsman, Niklas, Chang, Edward YiVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.021001
Date:
February, 2010
File:
PDF, 372 KB
english, 2010