Monolithic integration of Si nanowires with metallic...

Journal of Micromechanics and Microengineering 2011 / 12 Vol. 21; Iss. 12

Monolithic integration of Si nanowires with metallic electrodes: NEMS resonator and switch applications

Arkan, Evren F, Sacchetto, Davide, Yildiz, Izzet, Leblebici, Yusuf, Alaca, B Erdem
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/12/125018
Date:
December, 2011
File:
PDF, 1.27 MB
english, 2011
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