Impact of Flattened TiN Electrode on the Memory Performance...

Impact of Flattened TiN Electrode on the Memory Performance of HfO2 Based Resistive Memory

Chen, Pang-Shiu, Chen, Yu-Sheng, Lee, Heng-Yuan, Wu, Tai-Yuan, Gu, Pei-Yi, Chen, Frederick, Tsai, Ming-Jinn
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Volume:
15
Year:
2012
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/2.001205esl
File:
PDF, 388 KB
english, 2012
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