ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Cross-Sectional UV-Raman Measurement for Obtaining Two-Dimensional Channel Stress Profile in Extremely High-Performance pMOSFETs
Akamatsu, Hiroaki, Takei, Munehisa, Kosemura, Daisuke, Nagata, Kohki, Mayuzumi, Satoru, Yamakawa, Shinya, Wakabayashi, Hitoshi, Ogura, AtsushiYear:
2010
Language:
english
DOI:
10.1149/1.3375585
File:
PDF, 159 KB
english, 2010