An Infrared Absorption Study of LTCVD Silicon Dioxide

An Infrared Absorption Study of LTCVD Silicon Dioxide

Pavelescu, C.
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Volume:
130
Year:
1983
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2119872
File:
PDF, 231 KB
english, 1983
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