Nanolithography by Means of an Electrochemical Scanning Capillary Microscope
Staemmler, L., Suter, T., Böhni, H.Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1803834
File:
PDF, 773 KB
english, 2004