THE EVALUATION OF SURFACE MORPHOLOGY USING FLEXURE GUIDED...

International Journal of Modern Physics Conference Series 2012 / 01 Vol. 6

THE EVALUATION OF SURFACE MORPHOLOGY USING FLEXURE GUIDED NANO-POSITIONING SYSTEM AND ULTRA-PRECISION LATHE

Kwak, Nam-Su, Kim, Jae-Yeol
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Volume:
6
Language:
english
Journal:
International Journal of Modern Physics: Conference Series
DOI:
10.1142/s2010194512003133
Date:
January, 2012
File:
PDF, 975 KB
english, 2012
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