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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Design, Fabrication, and Performance Test of a Quartz Horn Megasonic Waveguide for Semiconductor Cleaning
Kim, Hyunse, Lee, Yanglae, Lim, EuisuYear:
2011
Language:
english
DOI:
10.1149/1.3630834
File:
PDF, 409 KB
english, 2011