[ECS 208th ECS Meeting - Los Angeles, California (October...

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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Impact of Al, Ni, and TiN Metal Gates On ZrO2-MOS Capacitors

Abermann, Stephan M., Efavi, Joseph, Lugstein, Alois, Auer, Erwin, Gottlob, Heiner, Schmidt, Mathias, Lemme, Max, Bertagnolli, Emmerich
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Volume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209300
File:
PDF, 396 KB
english, 2006
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