Precision Resistor Integration into a Submicron Silicided Complementary Metal Oxide Semiconductor Technology
Miles, Glen L., Grellner, Frank, Jamison, Paul C.Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393858
File:
PDF, 366 KB
english, 2000