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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Composite Polymer Core - Silica Shell Abrasive Particles During Oxide CMP: A Defectivity Study
Armini, Silvia, Whelan, Caroline M., Maex, KarenVolume:
3
Year:
2007
Language:
english
DOI:
10.1149/1.2819481
File:
PDF, 827 KB
english, 2007