Magnetic field measurements for N2 and H2 discharges from a...

Measurement 2006 Vol. 39; Iss. 8

Magnetic field measurements for N2 and H2 discharges from a low frequency RF inductively coupled plasma source

Chandan Kumar Chakrabarty
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Volume:
39
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.measurement.2006.03.003
File:
PDF, 243 KB
english, 2006
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