Development of a nano-displacement measurement system

Measurement 2007 Vol. 40; Iss. 3

Development of a nano-displacement measurement system

Shih-Kang Kuo, Chuan-Cheng Hung, Chang-Ching Lin, Wen-Ho Yang
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Volume:
40
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.measurement.2006.06.002
File:
PDF, 1.27 MB
english, 2007
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