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[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - 300 mm SOI for High Volume Manufacturing
Pfeiffer, Gerd, Haag, M., Schmidt, M., Krause, R., Tsai, P., Lee, J.D.Volume:
2
Year:
2006
Language:
english
DOI:
10.1149/1.2195657
File:
PDF, 673 KB
english, 2006