Metrology, static and dynamic characterization of...

Measurement 2009 Vol. 42; Iss. 3

Metrology, static and dynamic characterization of microstructures using acousto-optic-modulated-stroboscopic-interferometry

Murali Manohar Pai, Gino Rinaldi, Muthukumaran Packirisamy, Narayanswamy Sivakumar
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Volume:
42
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.measurement.2008.07.004
File:
PDF, 834 KB
english, 2009
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