Characterization of dual-periodic structures with optical...

Measurement 2011 Vol. 44; Iss. 1

Characterization of dual-periodic structures with optical scattering

Jun Wang, Wei Zhou, Anand K. Asundi, Lennie E.N. Lim, Er-Ping Li
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Volume:
44
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.measurement.2010.09.007
File:
PDF, 666 KB
english, 2011
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