ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Physical and Electrical Effects of the Dep-Anneal-Dep-Anneal (DADA) Process for HfO
Clark, Robert D., Aoyama, Shintaro, Consiglio, Steve, Nakamura, Genji, Leusink, GertYear:
2011
Language:
english
DOI:
10.1149/1.3572321
File:
PDF, 1.84 MB
english, 2011