ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Low Temperature Processing of Si-Based Dielectric Thin Films
Joshi, Pooran, Voutsas, A. Tolis, Hartzell, JohnYear:
2011
Language:
english
DOI:
10.1149/1.3572287
File:
PDF, 238 KB
english, 2011