ECS Transactions [ECS 220th ECS Meeting - Boston, MA...

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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Enhancement of a Channel Strain via Dry Oxidation of Recessed Source/Drain Si

Kim, Sun-Wook, Yoo, Jung-Ho, Koo, Sang-mo, Ko, Dae-Hong, Lee, Hoo-Jeong
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Year:
2011
Language:
english
DOI:
10.1149/1.3633297
File:
PDF, 339 KB
english, 2011
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