ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Enhancement of a Channel Strain via Dry Oxidation of Recessed Source/Drain Si
Kim, Sun-Wook, Yoo, Jung-Ho, Koo, Sang-mo, Ko, Dae-Hong, Lee, Hoo-JeongYear:
2011
Language:
english
DOI:
10.1149/1.3633297
File:
PDF, 339 KB
english, 2011