Integrated VCSEL-Microlens Scanner With Large Scan Range

Integrated VCSEL-Microlens Scanner With Large Scan Range

Chou, Jeffrey B., Quack, Niels, Wu, Ming C.
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2315810
Date:
December, 2014
File:
PDF, 1.59 MB
english, 2014
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