ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Effect of Slurry Application/Injection Methods and Polishing Conditions on Bow Wave Characteristics
Liao, Xiaoyan, Sampurno, Yasa, Zhuang, Yun, Sudargho, Fransisca, Rice, Adam, Philipossian, AraYear:
2011
Language:
english
DOI:
10.1149/1.3567654
File:
PDF, 100 KB
english, 2011