Design, fabrication, sensor fusion, and control of a micro...

Mechatronics 2009 Vol. 19; Iss. 7

Design, fabrication, sensor fusion, and control of a micro X–Y stage media platform for probe-based storage systems

Chee Khiang Pang, Yi Lu, Chengchen Li, Jian Chen, Hong Zhu, Jiaping Yang, Jianqiang Mou, Guoxiao Guo, Ben M. Chen, Tong Heng Lee
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Volume:
19
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.mechatronics.2009.03.005
File:
PDF, 1.14 MB
english, 2009
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