Complete Removal of Copper Contaminants on Bare Silicon...

Complete Removal of Copper Contaminants on Bare Silicon Surfaces by Use of HCN Aqueous Solutions

Narita, Hiroaki, Takahashi, Masao, Iwasa, Hitoo, Kobayashi, Hikaru
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Volume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2816324
File:
PDF, 470 KB
english, 2008
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