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A Simple Method for Gettering of Nickel within the Ni-Metal-Induced Lateral Crystallization Polycrystalline Silicon Film
Hou, Chih-Yuan, Wu, YewChung SermonVolume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2203353
File:
PDF, 228 KB
english, 2006