[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - HCl Selective Etching of Si1-xGex versus Si for Silicon On Nothing and Multi Gate Devices
Destefanis, Vincent, Hartmann, Jean-Michel, Hüe, Florian, Bensahel, DanielVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2986800
File:
PDF, 3.11 MB
english, 2008