[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - PEALD ZrO
Monnier, Denis, Gros-Jean, Mickael, Deloffre, Emilie, Doisneau, Béatrice, Coindeau, Stéphane, Crisci, Alexandre, Roy, Jéro^me, Mi, Yanyu, Detlefs, Blanka, Zegenhagen, Jorg, Wyon, Christophe, MartinYear:
2009
Language:
english
DOI:
10.1149/1.3207596
File:
PDF, 583 KB
english, 2009